Physical Intelligence

A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching

2016

Article

zwe-csfm


Author(s): Liebig, J. P. and Goken, M. and Richter, G. and Mackovic, M. and Przybilla, T. and Spiecker, E. and Pierron, O. N. and Merle, B.
Journal: Ultramicroscopy
Volume: 171
Pages: 82-88
Year: 2016

Department(s): CSF Materials
Bibtex Type: Article (article)

DOI: 10.1016/j.ultramic.2016.09.004

BibTex

@article{escidoc:4123478,
  title = {A flexible method for the preparation of thin film samples for in situ TEM characterization combining shadow-FIB milling and electron beam-assisted etching},
  author = {Liebig, J. P. and Goken, M. and Richter, G. and Mackovic, M. and Przybilla, T. and Spiecker, E. and Pierron, O. N. and Merle, B.},
  journal = {Ultramicroscopy},
  volume = {171},
  pages = {82-88},
  year = {2016},
  doi = {10.1016/j.ultramic.2016.09.004}
}